Ion Implantation Into Glassy and Amorphous Oxides: Ion-solid Interaction and Approach to Novel Function.

Neon and Manganese Ion Implantation into AlInN

Ion-Solid Interaction: Status and Perspectives

The past half century has seen an explosive growth of the discipline that is characterized by the deposition of localized high energy densities in solid matter, by means of energetic ions produced e.g. in particle accelerators. First the fundamentals of Ion-Solid Interaction are outlined. A brief overview is given about the basic energy transfer mechanisms and the consequences of ion impact int...

Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function

Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

The kinetics of stressed solid-phase epitaxial growth (SPEG), also referred to as solid-phase epitaxy, solidphase epitaxial regrowth, solid-phase epitaxial recrystallization, and solid-phase epitaxial crystallization, of amorphous (a) silicon (Si) created via ion-implantation are reviewed. The effects of hydrostatic, in-plane uniaxial, and normal uniaxial compressive stress on SPEG kinetics are...

Compaction of microporous amorphous solid water by ion irradiation.

We have studied the compaction of vapor-deposited amorphous solid water by energetic ions at 40 K. The porosity was characterized by ultraviolet-visible spectroscopy, infrared spectroscopy, and methane adsorption/desorption. These three techniques provide different and complementary views of the structural changes in ice resulting from irradiation. We find that the decrease in internal surface ...